Sputter yield- and ionisation yield variations of 100% Ge bombarded by O2+ primary ions

Huyghebaert, CedricCedricHuyghebaertConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7672Sputter yield- and ionisation yield variations of 100% Ge bombarded by O2+ primary ionsMeeting abstract