On the origin of grass formation in MHM-based single-damascene low-k etch

de Marneffe, Jean-FrancoisJean-Francoisde MarneffeGoossens, DannyDannyGoossensConard, ThierryThierryConardHendrickx, DirkDirkHendrickxStruyf, HerbertHerbertStruyfBoullart, WernerWernerBoullart2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15174On the origin of grass formation in MHM-based single-damascene low-k etchMeeting abstracthttp://www.pesm2009.be/