Micro-Transfer Printing on Silicon Photonics: Tutorial, Recent Progress and Outlook

Chen, YeYeChenAkritidis, KonstantinosKonstantinosAkritidisChen, Kai-WenKai-WenChenDe Jaeger, LisaLisaDe JaegerDe Witte, JasperJasperDe WitteGamez, Arturo FernandezArturo FernandezGamezGarrido, Miquel Fausti ChertaMiquel Fausti ChertaGarridoKiewiet, MaxMaxKiewietLi, HeHeLiLin, ChupaoChupaoLinMatuszek, KrzystofKrzystofMatuszekNenezic, PatrickPatrickNenezicNiels, MargotMargotNielsBonito Oliva, ValeriaValeriaBonito OlivaPoelman, StijnStijnPoelmanReep, TomTomReepTran Thi Ngoc LamVanackere, TomTomVanackereVan Severen, LucasLucasVan SeverenWithouck, JorikJorikWithouckQin, SenbiaoSenbiaoQinWang, DongboDongboWangWilliams, JamesJamesWilliamsXue, YuYuXueAtzeni, SimoneSimoneAtzeniBogaert, LaurensLaurensBogaertBisschop, SuzanneSuzanneBisschopDeng, HongHongDengDelli, EvangeliaEvangeliaDelliDieussaert, EmielEmielDieussaertEkkels, PhilipPhilipEkkelsLiu, YangYangLiuMcCaughery, TiernanTiernanMcCaugheryMoerman, ArnoArnoMoermanOzceri Iyikanat ElifPapadopoulou, AthinaAthinaPapadopoulouPan, BiweiBiweiPanSoltanian, EmadrezaEmadrezaSoltanianUzun, AliAliUzunVissers, EwoudEwoudVissersZenari, MicheleMicheleZenariZhai, TingtingTingtingZhaiZheng, XiujunXiujunZhengZhang, JingJingZhangBogaerts, WimWimBogaertsMorthier, GeertGeertMorthierVan Thourhout, DriesDriesVan ThourhoutBillet, MaximilienMaximilienBilletUvin, SarahSarahUvinKuyken, BartBartKuykenRoelkens, GuntherGuntherRoelkens2026-11-022026-11-0220260733-8724https://imec-publications.be/handle/20.500.12860/60687This paper highlights micro-transfer printing (MTP) as a promising scalable approach to heterogeneous integration for silicon photonics. MTP uniquely achieves high integration density, high throughput, and high material efficiency through a low-temperature, back-end integration process. Current demonstrations, including integrated III-V lasers and thin-film electro-optic modulators, confirm MTP’s potential. Industrial adoption requires resolving challenges related to final integration yield and throughput, device reliability, and supply chain maturity.engMicro-Transfer Printing on Silicon Photonics: Tutorial, Recent Progress and OutlookJournal article10.1109/jlt.2026.3689409WOS:001850162600001QUANTUM-DOT LASERSINTEGRATIONISOLATORFILM