Young, EdwardEdwardYoungChen, JianJianChenCosnier, VincentVincentCosnierLysaght, P.P.LysaghtMaes, JanJanMaesRoozeboom, F.F.RoozeboomZhao, ChaoChaoZhao2021-10-152021-10-152002https://imec-publications.be/handle/20.500.12860/7090Thermal processing of high-K materials thermodynamics and kineticsMeeting abstract