Mitard, JeromeJeromeMitardWitters, LiesbethLiesbethWittersLoo, RogerRogerLooLee, Seung HunSeung HunLeeSun, J.W.J.W.SunFranco, JacopoJacopoFrancoRagnarsson, Lars-AkeLars-AkeRagnarssonBrand, A.A.BrandLu, X.X.LuYoshido, N.N.YoshidoEneman, GeertGeertEnemanBrunco, DavidDavidBruncoVorderwestner, M.M.VorderwestnerStorck, P.P.StorckMilenin, AlexeyAlexeyMileninHikavyy, AndriyAndriyHikavyyWaldron, NiamhNiamhWaldronFavia, PaolaPaolaFaviaVanhaeren, DanielleDanielleVanhaerenVanderheyden, AnneliesAnneliesVanderheydenRichard, OlivierOlivierRichardMertens, HansHansMertensArimura, HiroakiHiroakiArimuraSioncke, SonjaSonjaSionckeVrancken, ChristaChristaVranckenBender, HugoHugoBenderEyben, PierrePierreEybenBarla, KathyKathyBarlaLee, Sun GhilSun GhilLeeHoriguchi, NaotoNaotoHoriguchiCollaert, NadineNadineCollaertThean, AaronAaronThean2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/2426615nm-WFIN high-performance low-defectivity strained-germanium pFinFETs with low temperature STI-last processProceedings paper