Ablett, JamesJamesAblettWilson, ChrisChrisWilsonPhuong, Nguyen MaiNguyen MaiPhuongKoike, JunichiJunichiKoikeTokei, ZsoltZsoltTokeiSterbinsky, GeorgeGeorgeSterbinskyWoicik, JosephJosephWoicik2021-10-202021-10-2020120021-4922https://imec-publications.be/handle/20.500.12860/20251Characterization of chemically vapor deposited manganese barrier layers using X-ray absorption fine structureJournal articlehttp://jjap.jsap.jp/link?JJAP/51/05EB01/