Sedky, SherifSherifSedkyBaert, KrisKrisBaertVan Hoof, ChrisChrisVan HoofWang, YiYiWangVan der Biest, OmerOmerVan der BiestWitvrouw, AnnAnnWitvrouw2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9578Metal induced crystallization of SiGe at 370 °C for monolithically integrated MEMS applicationsProceedings paper