Sioncke, SonjaSonjaSionckeCeuppens, JorisJorisCeuppensLin, DennisDennisLinNyns, LauraLauraNynsDelabie, AnneliesAnneliesDelabieStruyf, HerbertHerbertStruyfDe Gendt, StefanStefanDe GendtMuller, MatthiasMatthiasMullerBeckhoff, BurkhardBurkhardBeckhoffCaymax, MattyMattyCaymax2021-10-192021-10-1920110167-9317https://imec-publications.be/handle/20.500.12860/19799Atomic layer deposition of Al2O3 on S-passivated GeJournal article