Advanced 2D/3D simulations for laser annealed device using an atomic kinetic monte carlo approach and scanning spreading resistance microscopy (SRRM)

Noda, T.T.NodaEyben, PierrePierreEybenVandervorst, WilfriedWilfriedVandervorstVrancken, ChristaChristaVranckenRosseel, ErikErikRosseelOrtolland, ClaudeClaudeOrtollandClarysse, TrudoTrudoClarysseGoossens, JozefienJozefienGoossensDe Keersgieter, AnAnDe KeersgieterFelch, S.S.FelchSchreutelkamp, RobRobSchreutelkampAbsil, PhilippePhilippeAbsilJurczak, GosiaGosiaJurczakDe Meyer, KristinKristinDe MeyerBiesemans, SergeSergeBiesemansHoffmann, Thomas Y.Thomas Y.Hoffmann2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14219Advanced 2D/3D simulations for laser annealed device using an atomic kinetic monte carlo approach and scanning spreading resistance microscopy (SRRM)Proceedings paper