Peter, AntonyAntonyPeterCarbonell, LaureLaureCarbonellSchaekers, MarcMarcSchaekersAdelmann, ChristophChristophAdelmannMeersschaut, JohanJohanMeersschautFranquet, AlexisAlexisFranquetRichard, OlivierOlivierRichardBender, HugoHugoBenderTokei, ZsoltZsoltTokeiVan Elshocht, SvenSvenVan Elshocht2021-10-212021-10-2120130966-9795https://imec-publications.be/handle/20.500.12860/22922Selective chemical vapour synthesis of Cu3Ge: process optimisation and film propertiesJournal article