Impact of acid statistics on EUV local critical dimension uniformity

Jiang, JingJingJiangDe Simone, DaniloDaniloDe SimoneYildirim, OktayOktayYildirimMeeuwissen, MariekeMariekeMeeuwissenHoefnagels, RikRikHoefnagelsRispens, GijsGijsRispensDerks, PaulPaulDerksCusters, RolfRolfCusters2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28605Impact of acid statistics on EUV local critical dimension uniformityProceedings paper10.1117/12.2257903