Investigation of the hermeticity of BCB-dealed cavities for housing (RF-) MEMS devices

Jourdain, AnneAnneJourdainDe Moor, PietPietDe MoorPamidighantam, SayanuSayanuPamidighantamTilmans, HarrieHarrieTilmans2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6456Investigation of the hermeticity of BCB-dealed cavities for housing (RF-) MEMS devicesProceedings paper