Impact of selective epitaxial growth and uniaxial/biaxial strain on DIBL effect using triple FinFETs

dos Santos, S.D.S.D.dos SantosMartino, J.A.J.A.MartinoSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-182021-10-1820101807-1953https://imec-publications.be/handle/20.500.12860/17037Impact of selective epitaxial growth and uniaxial/biaxial strain on DIBL effect using triple FinFETsJournal article