Combination of e-beam lithography and of high velocity AlN/diamond-layered structure for SAW filters in X band

Kirsch, PhilippePhilippeKirschAssouar, Mohammed B.Mohammed B.AssouarElmazria, OmarOmarElmazriaEl Hakiki, M.M.El HakikiMortet, VincentVincentMortetAlnot, PatrickPatrickAlnot2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12402Combination of e-beam lithography and of high velocity AlN/diamond-layered structure for SAW filters in X bandJournal article