High thermal stability and high VUV absorption polymer for the P4/pore stuffing approach

Rutigliani, VitoVitoRutiglianiZhang, LipingLipingZhangde Marneffe, Jean-FrancoisJean-Francoisde MarneffeCao, YiYiCaoNoya, G.G.NoyaBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25845High thermal stability and high VUV absorption polymer for the P4/pore stuffing approachMeeting abstracthttp://pesm-conference.org/files/2015_abstractbook.pdf