Wittebrood, FrisoFrisoWittebroodde Winter, LaurensLaurensde WinterLast, ThorstenThorstenLastVan Look, LieveLieveVan LookPhilipsen, VickyVickyPhilipsenFinders, JoJoFindersSchiffelers, GuidoGuidoSchiffelersHendrickx, EricEricHendrickx2021-10-232021-10-232015https://imec-publications.be/handle/20.500.12860/26180Experimental verification of phase induced mask 3D effects in EUV imagingProceedings paper