Guo, BinBinGuoWang, BoBoWangWen, LianggongLianggongWenHelin, PhilippePhilippeHelinClaes, GertGertClaesDe Coster, JeroenJeroenDe CosterDu Bois, BertBertDu BoisVerbist, AgnesAgnesVerbistVan Hoof, RitaRitaVan HoofVereecke, GuyGuyVereeckeHaspeslagh, LucLucHaspeslaghTilmans, HarrieHarrieTilmansDecoutere, StefaanStefaanDecoutereOsman, HarisHarisOsmanPuers, BobBobPuersDe Wolf, IngridIngridDe WolfTanaka, ShujiShujiTanakaSeveri, SimoneSimoneSeveriWitvrouw, AnnAnnWitvrouw2021-10-202021-10-2020121057-7157https://imec-publications.be/handle/20.500.12860/20762Poly-SiGe-based MEMS thin-film encapsulationJournal article