Scanning spreading resistance microscopy for the calibration of process simulators on 65nm MOS technology.

Vemula, Sri CharanSri CharanVemulaEyben, PierrePierreEybenDe Keersgieter, AnAnDe KeersgieterMody, JayJayModyVandervorst, WilfriedWilfriedVandervorst2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13159Scanning spreading resistance microscopy for the calibration of process simulators on 65nm MOS technology.Oral presentation