Depth profiling of Al2O3 + TiO2 nanolaminates by means of a time-of-flight energy spectrometer

Laitinen, M.M.LaitinenSajavaara, T.T.SajavaaraRossi, M.M.RossiJulin, J.J.JulinPuurunen, R.L.R.L.PuurunenSuni, T.T.SuniIshida, T.T.IshidaFujita, H.H.FujitaBrijs, BertBertBrijsWhitlow, H.J.H.J.Whitlow2021-10-192021-10-1920110168-583Xhttps://imec-publications.be/handle/20.500.12860/19238Depth profiling of Al2O3 + TiO2 nanolaminates by means of a time-of-flight energy spectrometerJournal article