2D-3D integration of hexagonal boron nitride and a high-kappa dielectric for ultrafast graphene-based electro-absorption modulators

Agarwal, HiteshHiteshAgarwalTerres, BernatBernatTerresOrsini, LorenzoLorenzoOrsiniMontanaro, AlbertoAlbertoMontanaroSorianello, VitoVitoSorianelloPantouvaki, MariannaMariannaPantouvakiWatanabe, KenjiKenjiWatanabeTaniguchi, TakashiTakashiTaniguchiVan Thourhout, DriesDriesVan ThourhoutRomagnoli, MarcoMarcoRomagnoliKoppens, Frank H. L.Frank H. L.Koppens2022-03-092022-03-0920212041-1723WOS:000626756600008https://imec-publications.be/handle/20.500.12860/393872D-3D integration of hexagonal boron nitride and a high-kappa dielectric for ultrafast graphene-based electro-absorption modulatorsJournal article10.1038/s41467-021-20926-wWOS:000626756600008ELECTROOPTIC MODULATOROPTICAL MODULATORSSILICONOPERATIONBREAKDOWNMEDLINE:33594048