De Smedt, FrankFrankDe SmedtDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsVinckier, ChrisChrisVinckier2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5204The application of ozone in semiconductor cleaning processes - the solubility issueJournal article