Optical extensions integration for a 0.314-μm² 45-nm node 6-transistor SRAM cell

Verhaegen, StafStafVerhaegenNackaerts, AxelAxelNackaertsWiaux, VincentVincentWiauxHendrickx, EricEricHendrickxVandenberghe, GeertGeertVandenberghe2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11507Optical extensions integration for a 0.314-μm² 45-nm node 6-transistor SRAM cellProceedings paper