Effect of the composition of electrolyte on separation of porous silicon film by electrochemical etching

Solanki, Chetan SinghChetan SinghSolankiBilyalov, RenatRenatBilyalovPoortmans, JefJefPoortmansCelis, Jean-PierreJean-PierreCelisNijs, JohanJohanNijs2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6840Effect of the composition of electrolyte on separation of porous silicon film by electrochemical etchingOral presentation