Preparation and characterization of rare earth scandates as alternative gate oxide materials

Wagner, M.M.WagnerHeeg, T.T.HeegSchubert, J.J.SchubertZhao, ChaoChaoZhaoRichard, OlivierOlivierRichardCaymax, MattyMattyCaymaxAfanasiev, ValeriValeriAfanasievMantl, S.S.Mantl2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11534Preparation and characterization of rare earth scandates as alternative gate oxide materialsProceedings paper