Chiarella, ThomasThomasChiarellaParvais, BertrandBertrandParvaisHoriguchi, NaotoNaotoHoriguchiTogo, MitsuhiroMitsuhiroTogoKerner, ChristophChristophKernerWitters, LiesbethLiesbethWittersAbsil, PhilippePhilippeAbsilBiesemans, SergeSergeBiesemansHoffmann, Thomas Y.Thomas Y.Hoffmann2021-10-192021-10-192011-03https://imec-publications.be/handle/20.500.12860/18682Simple current and capacitance methods for bulk FinFET height extractionProceedings paper