Simulations of a non-planar lithography and of performance characteristics of arcade microthermopiles for energy scavenging

Leonov, VladimirVladimirLeonovWang, ZiyangZiyangWangPellens, RudyRudyPellensGui, Cheng-QunCheng-QunGuiVullers, RuudRuudVullersSu, JialeJialeSu2021-10-162021-10-162007-06https://imec-publications.be/handle/20.500.12860/12466Simulations of a non-planar lithography and of performance characteristics of arcade microthermopiles for energy scavengingProceedings paper