Croes, KristofKristofCroesCivale, YannYannCivaleLabie, RietRietLabieLi, YunlongYunlongLiDe Messemaeker, JokeJokeDe MessemaekerVanstreels, KrisKrisVanstreelsRedolfi, AugustoAugustoRedolfiVelenis, DimitriosDimitriosVelenisVarela Pedreira, OlallaOlallaVarela PedreiraVan De Peer, MyriamMyriamVan De PeerCherman, VladimirVladimirChermanVandevelde, BartBartVandeveldeBeyne, EricEricBeyneDe Wolf, IngridIngridDe Wolf2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20512Reliability challenges during different phases of 3D SIC processingMeeting abstract