Line-edge roughness reduction and CD slimming using hardback processing

Peters, R.D.R.D.PetersLucas, K.K.LucasCobb, J.L.J.L.CobbParker, C.C.ParkerPatterson, K.K.PattersonMcCauley, R.R.McCauleyErcken, MoniqueMoniqueErckenVan Roey, FriedaFriedaVan RoeyVandenbroeck, NadiaNadiaVandenbroeckPollentier, IvanIvanPollentier2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7997Line-edge roughness reduction and CD slimming using hardback processingProceedings paper