2D Laser lithography on silicon subtrates via photoinduced copper-mediated radical polymerization

Laun, JoachimJoachimLaunDe Smet, YanaYanaDe SmetVan de Reydt, EmmaEmmaVan de ReydtKrivcov, AlexanderAlexanderKrivcovTrouillet, VanessaVanessaTrouilletWelle, AlexanderAlexanderWelleMöbius, HildegardHildegardMöbiusBarner-Kowollik, ChristopherChristopherBarner-KowollikJunkers, TanjaTanjaJunkers2021-10-252021-10-2520181359-7345https://imec-publications.be/handle/20.500.12860/311242D Laser lithography on silicon subtrates via photoinduced copper-mediated radical polymerizationJournal article10.1039/c7cc08444ghttp://pubs.rsc.org/en/Content/ArticleLanding/2018/CC/C7CC08444G#!divAbstract