Applications of laser-Doppler vibrometry during MEMS device qualification

De Coster, JeroenJeroenDe CosterSangameswaran, SandeepSandeepSangameswaranDe Wolf, IngridIngridDe Wolf2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16939Applications of laser-Doppler vibrometry during MEMS device qualificationProceedings paper