Van Besien, ElsElsVan BesienPantouvaki, MariannaMariannaPantouvakiZhao, LarryLarryZhaoDe Roest, DavidDavidDe RoestBaklanov, MikhaïlMikhaïlBaklanovTokei, ZsoltZsoltTokeiBeyer, GeraldGeraldBeyer2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18151Influence of porosity on electrical properties of low-k dielectricsMeeting abstract