A novel test method for simultaneous measurement of thermal conductivity, CTE, residual stress and Young's modulus of suspended thin films using a laser Doppler vibrometer

De Coster, JeroenJeroenDe CosterLofrano, MelinaMelinaLofranoJansen, RoelofRoelofJansenRottenberg, XavierXavierRottenbergSeveri, SimoneSimoneSeveriBorremans, JonathanJonathanBorremansVan der Plas, GeertGeertVan der PlasDonnay, StephaneStephaneDonnayTilmans, HarrieHarrieTilmansDe Wolf, IngridIngridDe Wolf2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18779A novel test method for simultaneous measurement of thermal conductivity, CTE, residual stress and Young's modulus of suspended thin films using a laser Doppler vibrometerProceedings paper