Laser lift-off transfer of AlGaN/GaN HEMTs from sapphire onto Si: A thermal perspective

Ji, HangfengHangfengJiDas, JoJoDasGermain, MarianneMarianneGermainKuball, MartinMartinKuball2021-10-172021-10-1720090038-1101https://imec-publications.be/handle/20.500.12860/15539Laser lift-off transfer of AlGaN/GaN HEMTs from sapphire onto Si: A thermal perspectiveJournal article