Buca, D.D.BucaFeste, S.S.FesteHollander, B.B.HollanderMantl, S.S.MantlLoo, RogerRogerLooCaymax, MattyMattyCaymaxCarius, R.R.CariusSchaefer, H.H.Schaefer2021-10-162021-10-162005-04https://imec-publications.be/handle/20.500.12860/10167Growth of strained Si on He ion implanted Si/SiGe heterostructuresProceedings paper