Cho, Hag-JuHag-JuChoYu, HongYuHongYuYuRagnarsson, Lars-AkeLars-AkeRagnarssonChang, VincentVincentChangSchram, TomTomSchramO'Sullivan, BarryBarryO'SullivanKubicek, StefanStefanKubicekMitsuhashi, RiichirouRiichirouMitsuhashiAkheyar, AmalAmalAkheyarVan Elshocht, SvenSvenVan ElshochtWitters, ThomasThomasWittersDelabie, AnneliesAnneliesDelabieAdelmann, ChristophChristophAdelmannRohr, ErikaErikaRohrSinganamalla, RaghunathRaghunathSinganamallaChang, Shou-ZenShou-ZenChangSwerts, JohanJohanSwertsLehnen, PeerPeerLehnenDe Gendt, StefanStefanDe GendtAbsil, PhilippePhilippeAbsilBiesemans, SergeSergeBiesemans2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11859Nitrogen profile and dielectric cap layer (Al2O3, Dy2O3, La2O3) engineering on Hf-silicateProceedings paper