Analytical Electron Microscopy of Si1-xGex/Si Heterostructures and Local Isolation Structures

Armigliato, A.A.ArmigliatoBalboni, R.R.BalboniCorticelli, F.F.CorticelliFrabboni, S.S.FrabboniMalvezzi, F.F.MalvezziVanhellemont, JanJanVanhellemont2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/19Analytical Electron Microscopy of Si1-xGex/Si Heterostructures and Local Isolation StructuresOral presentation