Growth and integration of high-density CNT for advanced interconnects

Vereecken, PhilippePhilippeVereeckenCott, DaireDaireCottChiodarelli, NicoloNicoloChiodarelliRomo Negreira, AinhoaAinhoaRomo NegreiraVerhulst, AnneAnneVerhulstHantschel, ThomasThomasHantschelRichard, OlivierOlivierRichardGroeseneken, GuidoGuidoGroesenekenHeyns, MarcMarcHeynsDe Gendt, StefanStefanDe Gendt2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14742Growth and integration of high-density CNT for advanced interconnectsMeeting abstractwww.icsfs.ie