Defect generation in high-k gate dielectric stacks under electrical stress: the impact of hydrogen

Houssa, MichelMichelHoussaHeyns, MarcMarcHeynsStesmans, AndreAndreStesmans2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9066Defect generation in high-k gate dielectric stacks under electrical stress: the impact of hydrogenOral presentation