Chiodarelli, NicoloNicoloChiodarelliKellens, KristofKristofKellensCott, DaireDaireCottPeys, NickNickPeysArstila, KaiKaiArstilaHeyns, MarcMarcHeynsDe Gendt, StefanStefanDe GendtGroeseneken, GuidoGuidoGroesenekenVereecken, PhilippePhilippeVereecken2021-10-182021-10-1820100013-4651https://imec-publications.be/handle/20.500.12860/16861Integration of vertical carbon nanotube bundles for interconnectsJournal article