Advanced semiconducting structure analysis with Self-Focusing SIMS and improved mass resolution in a Hybrid SIMS instrument

Franquet, AlexisAlexisFranquetSpampinato, ValentinaValentinaSpampinatoKayser, SvenSvenKayserHavelund, RasmusRasmusHavelundGilmore, IanIanGilmoreVandervorst, WilfriedWilfriedVandervorstvan der Heide, PaulPaulvan der Heide2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30727Advanced semiconducting structure analysis with Self-Focusing SIMS and improved mass resolution in a Hybrid SIMS instrumentProceedings paper