Stripping of ion implanted photoresist by Co2 cryogenic pre-treatment followed by wet cleaning

Malhouitre, StephaneStephaneMalhouitreVos, RitaRitaVosBanerjee, SouvikSouvikBanerjeeBearda, TwanTwanBeardaMertens, PaulPaulMertens2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14104Stripping of ion implanted photoresist by Co2 cryogenic pre-treatment followed by wet cleaningOral presentation