Watanabe, M.M.WatanabeNakamura, Y.Y.NakamuraKondoh, E.E.KondohBaklanov, MikhaïlMikhaïlBaklanov2021-10-232021-10-232015https://imec-publications.be/handle/20.500.12860/26167Thermal etching of metal thin films using supercritical fluidMeeting abstracthttp://pesm-conference.org/files/2015_abstractbook.pdf