Rotondaro, AntonioAntonioRotondaroSchmidt, HaraldHaraldSchmidtMeuris, MarcMarcMeurisHeyns, MarcMarcHeynsClaeys, CorCorClaeysMulready, J.J.Mulready2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/325Interaction of the sulphuric acid hydrogen peroxide mixture with silicon surfacesProceedings paper