Printing the contact and metal layers for the 32 and 22 nm node: comparing positive and negative development process

Bekaert, JoostJoostBekaertVan Look, LieveLieveVan LookWiaux, VincentVincentWiauxTruffert, VincentVincentTruffertMaenhoudt, MireilleMireilleMaenhoudtVandenberghe, GeertGeertVandenbergheReybrouck, MarioMarioReybrouckTarutani, S.S.Tarutani2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/14967Printing the contact and metal layers for the 32 and 22 nm node: comparing positive and negative development processProceedings paper