Study of copper surface preparation by sequential atomic layer wet etching and laser annealing treatments

Iwasaki, AkihisaAkihisaIwasakiAkanishi, YuyaYuyaAkanishiMazzamuto, FulvioFulvioMazzamutoKesters, ElsElsKestersLe, Quoc ToanQuoc ToanLeHolsteyns, FrankFrankHolsteyns2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28575Study of copper surface preparation by sequential atomic layer wet etching and laser annealing treatmentsProceedings paperhttp://ecst.ecsdl.org/content/80/2/233.abstract