Scaled-down c-Si and c-SiGe wagon-wheels for the visualization of the anisotropy and selectivity of wet-chemical etchants

Pacco, AntoineAntoinePaccoTao, ZhengZhengTaoRip, JensJensRipvan Dorp, DennisDennisvan DorpPhilipsen, HaroldHaroldPhilipsenHolsteyns, FrankFrankHolsteyns2021-10-272021-10-2720191556-276Xhttps://imec-publications.be/handle/20.500.12860/33719Scaled-down c-Si and c-SiGe wagon-wheels for the visualization of the anisotropy and selectivity of wet-chemical etchantsJournal articlehttps://doi.org/10.1186/s11671-019-3114-8