Low temperature pre-epi treatment: critical parameters to control interface contamination

Loo, RogerRogerLooHikavyy, AndriyAndriyHikavyyLeys, FrederikFrederikLeysWada, MasayukiMasayukiWadaDe Vos, BrechtBrechtDe VosPacco, AntoineAntoinePaccoBargallo Gonzalez, MireiaMireiaBargallo GonzalezSimoen, EddyEddySimoenVerheyen, PeterPeterVerheyenVanherle, WendyWendyVanherleCaymax, MattyMattyCaymax2021-10-182021-10-1820091662-9779https://imec-publications.be/handle/20.500.12860/15740Low temperature pre-epi treatment: critical parameters to control interface contaminationJournal article