Huyghebaert, CedricCedricHuyghebaertJanssens, TomTomJanssensBrijs, BertBertBrijsVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7673Ionization probability changes of the Si+ ions during the transient for 3 keV O2+ bombardment of SiJournal article