Measurement and simulation of boron diffusivity in strained Si1-xGex epitaxial layers

Krishnasamy, RajendranRajendranKrishnasamySchoenmaker, WimWimSchoenmaker2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4685Measurement and simulation of boron diffusivity in strained Si1-xGex epitaxial layersProceedings paper