Yoshizawa, MasakiMasakiYoshizawaPhilipsen, VickyVickyPhilipsenLeunissen, PeterPeterLeunissen2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11596Impact of the absorber thickness variation on the imaging performance of ArF immersion lithographyProceedings paper